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Dr. Bashar Lahlouh
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Supercritical Carbon Dioxide Process for Forming Nanoporous Dielectrics
Shubhra Gangopadhyay (Texas Tech), J. Lubguban , T. Rajagopalan , Bashar I. Lahlouh (Texas Tech), Juan Sun (Texas Tech), D. Huang , Sindee Simon (Texas Tech), W. Volksen , Hyungjun Kim (IBM), R. D. Miller
Semiconductor Research Corp. at Rensselaer Polytechnic Institute
USA
2003
Others
Presentation
Use of SCCO2 Processing for Integration and Formation of Ultra Low-k Dielectrics
D. Toma, M. Biberger, R. Butler, J. Sun, T. Rajagopalan, , B. Lahlouh,….
International Sematech/ Ultra low k workshop
USA
2002
Others
Presentation
Supercritical CO2 Process for Porous Materials and Clean
B. Lahlouh, S. Gangopadhyay
SRC Center for Advance Interconnect Systems Technologies Review Meeting at Rensselaer Polytechnic Institute
USA
2002
Others
Presentation
Novel Method for Producing Nanoporous Dielectric Films
B. Lahlouh, X. Wang, N. Metha, S. Gangopadhyay
MRS Fall meeting 2000. (Symposium L)
USA
2000
Others
Presentation
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