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Research Title

Effect of annealing on CVD W-Si-N/SiO 2 /Si structures

Authors

O.H. Gokce, S. Amin, A. Patel, V. Rajasekhar, S. Abedrabbo and N.M. Ravindra, J.G. Fleming, P.J. Zanzucchi, R.J. Paff and D.J. Szostak

Conference

Fifth International Conference on Advanced Thermal Processing of Semiconductors RTP 97

Country

USA

Date

1997

Nature of contribution

Participant

Others

5, pp. 412-419

Attachments

Content Type: Announcement
Created at 8/11/2011 1:14 PM by JU\sufiana
Last modified at 8/11/2011 1:14 PM by JU\sufiana